Abstract
An indium oxide based precursor solution has been developed by spin-coating method. In order to apply this material to a mass production, material, process and equipment optimizations for slot die coating have been implemented. Slot die coating is a cost-effective, scalable process and already applied to photoresist materials in the display industry. The indium oxide based precursor solution has been coated on bare glasses and TFT substrates by a mass production type slot die coater. Mobility of over 10cm2/Vs is achieved for the first time for large area at annealing temperatures of 350°C. The homogeneity of the film will be presented.
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