Abstract
The traveling wave micropump with a thin flow layer is suitable for particle separation and quantification without valves, heat and strong electric field. We have proposed a traveling wave micropump driven by the traveling wave, and demonstrated high efficiency. In this paper, we fabricated a traveling wave micropump composed of flexible microchannel wall made of Polydimethylsiloxane (PDMS) with piezoelectric thin-film unimorph actuators. The piezoelectric thin films were deposited directly on cantilever-shaped stainless steel (SUS) substrates using rfagnetron sputtering technique. The active motion of the particles in the fluid was confirmed by the actuation of the microchannel wall by the piezoelectric actuators.
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