Abstract

In this work a micro structured metal oxide (MOX) gas sensor was investigated as an infrared (IR) radiation source for an IR gas measurement system. Thus, the advantages of both sensor principles can be combined, namely the high sensitivity and broad response spectrum of the MOX gas sensor based on a chemical sensing principle as well as the high selectivity and stability of the IR measurement based on a physical sensing principle. This selectivity for one application specific gas molecule is achieved by a radiation sensor with integrated optical filter. For example, for indoor air quality monitoring the IR measurement could be used to measure the concentration of carbon dioxide (CO2), while the MOX gas sensor could be used for detecting volatile organic compounds (VOCs).

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