Abstract
This paper discusses a novel application of Particle Desorption Mass Spectrometry for surface characterization. The first results obtained by combining 252Cf-PDMS with keV ion sputtering for depth profiling analysis are presented. The PDMS depth profile of a 4660 Å layer of Al on Si was corroborated by XPS depth profiling and indicates an information depth for PDMS of 1 to 3 monolayers.
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