Abstract
In this paper 2/3-D device simulation is presented as a highly useful and effective tool in microelectronics education for the analysis and characterization of electrothermal behavior of semiconductor structures and devices, standing alone and/or coupled in integrated circuits. Authors used Technology Computer Aided Design as a simulation tool in the education process at Institute of Electronics and Photonics more as a decade. The demonstrated examples of authors' practical experiences illustrate the potential, power and fineness of process and devices simulations for students, to understand inner processes in electronic devices, parasitic behavior and fabrication.
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