2.3.1 Benefits and Costs of Model‐Based Fault Diagnosis for Semiconductor Manufacturing Equipment

Abstract

AbstractModel‐Based Diagnosis (MBD) is a promising solution for the fault diagnosis of complex systems. In this paper we review the benefits and costs of MBD. Our research is performed in cooperation with ASML which is the world's leading manufacturer of lithography systems for the semiconductor industry. We analyse the current way of working and the benefits that MBD offers. We present the results of practical modeling studies and discuss the benefits, costs, and cost reduction methods. We summarize the current research results and ongoing developments. Our results show that MBD has a high potential for diagnosis in a rapidly innovating industry. The fulfilment of this potential depends on the cost of modeling and the acceptance of MBD as part of broader pursuit for model‐based systems engineering.