23.4: Invited Paper: Active‐Matrix Backplanes Produced by Roll‐to‐Roll Self‐Aligned Imprint Lithography (SAIL)

Abstract

AbstractProgress in the development of a fully roll‐to‐roll self‐aligned imprint process for producing active matrix backplanes with submicron aligned features on flexible substrates is reported. High performance transistors, crossovers and addressable active matrix arrays have been designed and fabricated using imprint lithography. Such a process has the potential of significantly reducing the costs of large area displays. The progress, current status and remaining issues of this new fabrication technology are presented.