Abstract
This paper presents a two-dimensional optical mirror driven by comb-drive actuators. The optical mirror fabricated by MEMS (micro electromechanical systems) technology is expected to have a small size and lightweight compared to conventional galvano scanners. This two-dimensional micro mirror equipping the inclined leaf springs in suspensions were designed and simulated by FEA (finite element analysis). The result of FEA showed that the maximum angular deflection of the optical mirror is about 1.4° in each axis. The new fabrication method is developed in order to simplify a fabrication process in comparison with the conventional method. The new method fabrication of inclined leaf springs were completed. We demonstrated a mirror device and it showed an optical angle of 0.2°
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