Abstract
This paper reports on built-in position sensing on an electrostatic induction actuator, combined with burst signal driving. The actuator has three-phase electrodes for driving, which are segmented into two units. Position of the slider sheet is estimated by the ratio of the capacitances of the two units. Capacitance measurement is done within inactive periods of burst signal driving. During the inactive periods, the circuit for sensing is closed such that high-frequency sensing signal flows through the driving electrodes. The experimental results show that the proposed method can successfully estimate the position of the slider, regardless of sheet materials.
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