2205 弾性表面波モータの薄型化について(センサ・アクチュエータ(2))

Abstract

Surface acoustic wave motor has been investigated and then its superior performances such as high speed, high thrust, quick response and so on are demonstrated. However, for high performance operationg of the SAW motor, huge laboratory setup are required. From the view point of low-profile elements of the motor, namely, thin stator and thin slider, low-profile actuator system should be designed.