220406 CMP工程で見られるウォーターマーク形成に関する基礎的研究(OS16 東京ブロック・山梨ブロック共同企画 機械工学が支援する微細加工技術(半導体・MEMS・NEMS)2(研磨プロセス),オーガナイズド・セッション)

Abstract

The water flow was supplied from a nozzle on a rotating disk and the droplet formation process on the disk was investigated experimentally for the fundamental study of the water mark formation in CMP process. The rotating disk was made by an acrylic resin. The droplet formation process was observed by using a high speed video camera. Diameters of droplets remained on the disk were measured at various conditions of rotation speed and supplying water flow rate. As the results, it was found that the mean diameter of remained droplets became small with the increasing of disc rotation speed.