2203 高周波交流圧力源を用いた多自由度マイクロアクチュエータシステムの開発(センサ・アクチュエータ(2))

Abstract

This paper presents a multi-DOF (degrees of freedom) microactuator system using a high frequency alternating-pressure source. The alternating flow from the pressure source is rectified by the synchronized active valves to drive plural hydraulic microactuators. To increase the position resolution and downsize the pressure source, the driving frequency was increased using high response piezoelectric elements. Thin piezoelectric valves and an alternating-pressure source were proposed and developed using piezoelectric bimorph disks. In addition, a 10 mm long bending rubber actuator with two chambers was fabricated and a system was constructed. The bending motion of the actuator was experimentally clarified.