Abstract

In order to investigate the thermal transport properties of strained bismuth telluride thin films, we carried out an electron beam (EB) irradiation to the thin films, and then measured the thermal conductivity by 3ω method. It was found that the crystallinity was dependent upon the EB irradiation dose whereas the crystal orientation of thin films was not affected. The lattice constants of a- and c-axis were shifted slightly with increasing the EB irradiation dose. Finally, The thermal conductivity of thin films was influenced strongly with the EB irradiation but the relationship between the magnitude of thermal conductivity and dose of EB irradiation was not clear yet.

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