Abstract

Conventional wet electrodes for Electroencephalogram (EEG) measurement require skin preparation and electrically conductive glue. This is time consuming and highly invasive. On the other hand, microneedle electrodes can eliminate this process by penetrating through the high impedance stratum corneum. So far, various silicon microneedles have been proposed. However, silicon is so brittle that silicon microneedles easily break and remain in the skin. Thus, our group has developed a polymer-based dry microneedle electrode. We used SU-8 as the structural material and silver as the conductive layer. In order to protect the silver layer while keeping sufficient conductivity, we coated the surface of the electrode with nanoporous parylene film. In this study, high-quality EEG signals could be measured on the forehead with this electrode. It will provide better comfort to users than wet electrode.

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