Abstract
In order to meet the demands of high integration in electronic and optical applications, mechanical micro-machining technology [1,2] has been progressing rapidly in recent years for its 3D accessibility to a variety of materials. Newly developed in this research is a multifunctional machining system capable of micro- milling, turning, grinding, buffing, polishing, EDM, ECM, laser machining and their combinations. This paper reports design and development of the system and its application in micro lens mold fabrication.
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