Abstract
2111. Profiles of radiation defects and implanted boron in silicon: N P Dikiy et al,Fiz Tekh Polup, 9 (3), 1975, 592–594 ( in Russian)
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https://doi.org/10.1016/0042-207x(76)90275-x
Journal: Vacuum | Publication Date: Nov 1, 1976 |
2111. Profiles of radiation defects and implanted boron in silicon: N P Dikiy et al,Fiz Tekh Polup, 9 (3), 1975, 592–594 ( in Russian)
Join us for a 30 min session where you can share your feedback and ask us any queries you have