Abstract
MEMS or micro electromechancal systems have been started from the field of microfabrication processes based upon the semiconductor fabrication technologies. Significance of MEMS is in the implementation capability of micromechanical components with integrated electrical circuits. MEMS actuators on the first emerging stage were simply micromechancial structures that could be electrically controlled. MEMS devices today, on the other hand, are embedded in electrical circuit and they behaves like a part of electronics. In this talk we present a few such examples of MEMS actuators integratd with control electronics. We also show a home made multiphysics MEMS simulator based on Qucs (quite universal circuit simulator), a general public licensed electrical circuit simulator. The newly develop simulator can handle DC and AC behavior calculation of electrostatic atuators in both small and large amplitude domains including typical electrostatic hysterisys analysis.
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