Abstract
A fluid-driven spindle was designed for ultra-precision machine tool. The spindle rotor is supported by hydrostatic bearings. The rotor has several bended flow channels inside its body. When fluid flows through the channels, the driving torque is generated by the fluid power. The rotational direction of the spindle can be controlled by switching supply ports of the fluid flow. The fluid-driven spindle is a main component of our ultra-precision machining system. The diamond cutting carried out using the machining system. As a result of diamond cutting test, machining surface became a mirror-finished surface and the roughness was 10 nmRa or less. Surface roughness is influenced by axial motion accuracy of the spindle. Thus, the axial motion of the spindle is measured and the axial runout of the spindle are measured.
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