Abstract
This research aims to develop a highly sensitive measurement method of elemental compositions using Laser Induced Breakdown Spectroscopy (LIBS). LIBS is a measurement method to detect elemental compositions in gas, liquid, and solid materials by laser induced plasma. In recent years, various environmental regulations have been strengthened in exhaust gas from engines, thermal power plants, and factories. In this study the LIBS detection limit has been improved using low pressure laser induced plasma process. The generation of plasma is stabilized and a non-equilibrium low temperature plasma state can be attained at 1 kPa pressure range. It was demonstrated that the detection limit of LIBS can be improved by a facer of ten or more using the low pressure LIBS method.
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