Abstract
AbstractThermal shrinkage of annealed Corning 1737 glass was measured following simulated thermal cycles for low temperature poly‐Si fabrication. If process temperature is reduced from 600 to 550°C, thermal shrinkage decreases by more than 50%. Reduction of process temperature as well as cycle time have a large impact on reducing thermal shrinkage.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
