Abstract
In late years, a group of minuteness sensor corresponding to this and minuteness sensors to clarify minuteness structure of a flow is demanded as miniaturization of a measurement device advances. I develop micro shear stress sensor that it aimed for the measurement and control of a flow of a heat fluid by this study. Based on silicon, I examine a production process of a metal film or semiconductor film of the minuteness sensors that assumed a resistance sensor. And made a prototype in this school clean room, I report the summary here.
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