Abstract

Coupled Resonator Filters (CRF) are an evolution of Bulk Acoustic Wave (BAW) filters which overcome the limitations of BAW and SAW filters and may become in the next few years the leading technology for RF filters. This paper presents for the first time a 200mm process for CRF utilizing equipments and infrastructures of a standard IC fab. Key process improvements to reach an attractive device yield on wafer, in particularly the trimming process, are described.

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