高精度な直線運動に関する研究(第2報)

Abstract

A machine slide has five degrees of freedom, two of translation and three of rotation, when it moves along a guideway. Corresponding to these, there are five kinds of straight motion errors, those are the errors of the vertical and horizontal positions and those of the pitch, roll and yaw angles. In the system, a steel block is floated by some air pads. The block and pads are mounted on a conventional mechanical sliding table. The straight motion errors of the block are detected by some optical and electronic devices and then the block is controlled in its positions and angles by changing the supply pressure to the air pads. Thus only the block moves straightly. In this report, three degrees of freedom, i. e. the vertical position, pitch and roll angles, of the block are controlled. The working length of the system is 600 mm. The error of the vertical position against the straight edge is less than 0.05 μm and changes of the pitch and roll angles are less than 0.2 sec of arc.