2-3 ガラスのエンドミル切削とその応用(OS2-2 三次元の微細形状創成技術)

Abstract

Micro machining of glass is required for manufacturing of glass devices such as micro TASs. However, some issues have been left on the flexibility, the machining costs and the environmental impact. The paper discusses glass milling for machining of micro glass devices. The milling process is applied to machining of micro grooves with the inclined ball end mill. The micro grooves are machined in depth of more than 10μm in a cutter feed. The surface finish and the tool wear can be improved by inclination of the milling tool. Some applications are shown to verify the glass milling in manufacturing of micro devices.