Abstract
We developed a small piezoelectric vibrator using an ultrasonic resonance of a pin-array. The ultrasonic vibrator consists of a single piezoelectric ceramics and a elastic metal. Tactile stimulation is generated by amplitude modulations of an ultrasonic vibration. In order to make large generative force and vibration amplitude, the ultrasonic vibrator was designed by finite element analysis. The theory of dynamic damper was applied between a pin-array and a bottom plate of vibrator, could get the large vibration amplitude and arranged the vibratory distribution of a pin-array. Finally, we made a prototype of an ultrasonic vibrator and evaluate it.
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