Abstract

Fabricating high quality Josephson junction is essential in superconducting qubit circuits. In this letter, high quality tunnel junctions with a low critical current density of ∼32A/cm2 were fabricated. The 1/f noise parameter η was obtained from junctions’ low frequency voltage noise power spectral density Sv(f)=1fηA(IbRD)2. Our findings showed that the noise spectrum is junction linear dimension dependent, indicating the junction’s side leakage current induced by defects in the amorphous oxide insulator dominates the origin of the 1/f noise in our epitaxial NbN/AlN/NbN tunnel junctions.

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