Abstract

In the previous paper, we used a semiconductor laser and a position sensing detector(PSD) to measure two DOF position of spherical ultrasonic motor(SUSM) and the effectiveness was confirmed. However, we have not realized three DOF position detection and control. Therefore, in this paper, we develop a new spherical rotor with two built-in semiconductor lasers to measure three DOF position of SUSM. Experiments are examined and the precision of the system is investigated.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.