Abstract
In this study, we established a method to fabricate three-dimensional (3D) metallic movable microparts by the combination of electroless plating and laser ablation. In this method, a polymeric movable microparts with anchors made by two-photon microfabrication are metalized by electroless plating, and then the anchors are removed by laser ablation using a femtosecond plused laser. As a result, a metalized freely movable micropart restricted to a shaft can be produced. We succeeded in fabricating sophisticated 3-D microrotors by optimizing the experimental conditions of both electroless copper plating and laser ablation.
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