Abstract

This paper demonstrates a roll‐to‐roll nanoimprinting process for the mass production of structured films used on display devices. Nanoimprint lithography is one of the novel techniques for nanofabrication. It is especially suitable for mass production due to its high throughput with comparable resolutions to photo‐ and e‐beam lithography. In this work, it is applied to the production of e‐ink film that has “microcups” to fill in e‐ink pigments. The dimensions of the microcups could be adjusted by designing stamp geometries. With several flexible stamps joint together to a sleeve on the roller, this nanoimprinting process could be extended to a roll‐to‐roll equipment. For mass production of structured films, the pattern transfer quality should be consistent with very low defect rates. This is to be achieved by improving the materials for resist and stamp, the nanoimprinting conditions and sleeve fabrication, etc.

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