Abstract
We have successfully developed the ultra‐high resolution 3,000ppi RGB direct patterning of OLED Micro‐display with high device performance. To fabricate this 3,000ppi RGB OLED Micro‐ display, FMM by UV Laser process was used and this FMM is manufactured by our unique Laser Patterning process. And red, green, and blue pixels were direct patterned by organic evaporation system with high precious alignment between Si substrate and FMM. To improve the device life time, very thin multi films of SiN/Carbon polymer/SiN were deposited by our unique PoCVD system.
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