Abstract

We developed a patterning technology via photolithography that does not use a fine metal mask to achieve high resolution for all RGB pixels. An 8.3‐inch 1058‐ppi organic light‐ emitting diode (OLED) display was prototyped using the technology for an oxide semiconductor backplane over a glass substrate. Having no restriction on alignment accuracy, metal mask washing, running costs, etc. in the manufacturing process of medium‐ or large‐sized OLED displays, this technology holds promise for enabling the mass production.

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