Abstract
AbstractSuper Grain Silicon SGS technology has been developed for TFT backplanes for large area AMOLED TVs. PMOS TFTs based on the SGS method have mobility above 50 cm2/V‐s and off‐current below 10−12 A, which enable mass production of AMOLED TVs on next generation fabs. Pixel‐to‐pixel brightness uniformity, related to leakage current and grain boundaries, was improved from below 85% to above 90%. ΔVth and brightness uniformity of 14″ TV panels are 1.13V and 83%, respectively, over the entire Gen. 6 area. Potential and technical issues of the SGS process for AMOLED TVs will be further discussed.
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