Abstract
A low‐temperature technology based on the elevated‐metal metal‐oxide thin‐film transistor (TFT) architecture was developed for realizing electronic systems on flexible polyimide (PI) substrates. An excimer laser was used to lift‐off the PI from a glass carrier substrate. The performance of the TFTs before and after the laser‐lift‐off exhibits insignificant difference. A variety of digital and analog circuit building blocks were simulated, fabricated and characterized. Finally, ratio‐less logic circuits based on depletion‐and enhancement‐mode TFTs have been designed. The threshold voltage can be adjusted by selective fluorination, choice of semiconducting MO or a dual‐gate architecture.
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