Abstract
Development of a high-speed microfabrication technique using focused laser beam was conducted. Conventional CAD/CAM system was used and the beam was scanned mechanically by attaching both optical mirror arrays and a focal lens to the column of an ultraprecision machining center. Measured groove width and pocket depth obtained by grooving and pocket machining were used as a tool diameter and an axial depth of cut. A glass-like carbon having over 80% laser beam absorptivity and 650MHv hardness was employed as a workpiece. It was verified through the machining test that pseudo 3 dimensional concave prisms could be fabricated by digging square pockets with different square sizes and the same pocket depth to negative Z direction. Shifting laser focal point from the work surface could control a depth of the square pocket, so that a high-speed roughing by adjusting focal point on the work surface could be conducted. In addition, the laser micromachining system could be adapted to a high-speed finishing by shifting focal point from the work surface.
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