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Abstract
A rotation/revolution type polishing tool has been proposed for surface roughness improvement and for polishing rate stability. Pipe-shaped tool is driven to rotation and revolution, simultaneously. When the rotation axis is inclined in a plane to the revolution axis normal to work surface, the end surface of the pipe-shaped tool would be formed through work polishing and tool wearing from cone to sphere. Then, the spherical contact between tool surface and work surface is expected to result an ideal tool locus condition that is an isotropic and homogenous tool locus density over the contact area.
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