1404 デスクトップ研削システムのための新しいELID研削技術(S78-2 高機能研削加工(2),S78 高機能研削加工)

Abstract

A demand for the mold of micro-lens is on the increase. As a system for the machining of micro-lens mold, a desk-top machine tool is being expected. But, when the grinding wheel with the small diameter is used, the ELID grinding method has a problem about the installation setting place of the negative electrode along the wheel. In this research, we developed a system to electrolyze the small type ELID grinding wheel. This system was realized SLID grinding processing without using the negative electrode along the wheel, for the purpose of machining of micro lens mold. That result succeeded in the development of the ELID grinding system which uses nozzle type electrodes (new electrode less ELID grinding method). Then, the processing using this system could get the mirror surface of Ra 12nm without electric discharge scar. There was a small abrasion of ELID grinding wheel and abundant volume of material removed.