Abstract
An analytical model is developed to calculate neutron-induced SEU cross section in deep submicron devices from heavy ion SEU cross section. It is based on the energy spectra of the secondaries of n +Si nuclear reactions which yields the LET distribution of all secondary ions. The integration of this distribution function with the measured heavy ion cross section vs. LET yields the n-SEU cross section. To make the calculations straight forward, the neutron-induced LET distribution is fitted by simple functions. The model is applied to SEU from 14 MeV neutrons and compared with experimental results. Its relevance to proton-induced SEU is discussed.
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