13.56 MHz RF 플라즈마 임피던스 정합기용 전자식 가변 커패시터의 가변 속도 최적화를 위한 인덕터 설계 방법

Abstract

This study introduces a method for designing an inductor for an electrical variable capacitor for an RF plasma impedance matcher of 13.56 MHz. In the RF impedance matcher, variable capacitors are essentially used for maximum power transfer of loads and sources. Electrical variable capacitors are next-generation variable capacitors. They can shorten the matching time compared with conventional mechanical variable capacitors. The proposed design method determines the inductor value with an optimized variable speed through the inductor design of the diode series-type electrical variable capacitor circuit. This method provides a faster variable speed to the electrical variable capacitor circuit to further shorten the matching time. The proposed design method is validated through simulations and experiments.