Abstract
With the use of a backscattering geometry, the elastic 12C(α, ga) 12C resonance at 4.265 MeV can produce an increment greater than one-hundredfold over the conventional Rutherford cross-section for carbon. In addition, the signal width is 70 keV, and can be used for depth profiling as a function of ion beam energy. A modified computer simulation program that takes into account the resonance scattering process can measure carbon-containing layers with a thickness of about 1 nm. Several examples that describe the applicability of the approach are given.
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