Abstract
Partial pressures of different residual gases in a high-vacuum system of stainless steel are studied for some normal vacuum processes; ie outgassing of the system by heating (baking) at different total pressures, and evaporation of titanium at low pressures. Large variations are observed in absolute as well as in relative partial pressures of the residual gases. A comparison is made with pump-down in a new and clean vacuum system. Partial pressure measurements may give significant information about gases affecting the properties of evaporated films.A simple omegatron of type Leybold with tungsten emitter and without guard rings and side plates is used for the residual gas analysis. The performance of the omegatron is discussed in an earlier paper. The method derived in that paper for obtaining a reliable result in partial pressure measurements by eliminating the fluctuating omegatron collection efficiency has been used.
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