Abstract
1136. Deposition of silica films by the glow discharge technique: D R Secrist and J D Mackenzie, J Electrochem Soc, 113, 1966, 914–920
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https://doi.org/10.1016/0042-207x(67)92403-7
Journal: Vacuum | Publication Date: Jun 1, 1967 |
1136. Deposition of silica films by the glow discharge technique: D R Secrist and J D Mackenzie, J Electrochem Soc, 113, 1966, 914–920
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