Abstract
New type of micromachined tweezers, named AFM tweezers, are presented. The AFM tweezers combine the function of nano objects manipulation with AFM observation so that they can pick up nano objects during AFM observation sequence. There are two types of AFM tweezers under developing; One is called chopstick-type AFM tweezers, and another is piston-type one, according to the gripping mechanism of the tweezers structures. Both devices have two thin probes sharpen by anisotropic etching of silicon and local oxidation of silicon techniques. In this paper, we describe concept and fabrication of AFM tweezers, and demonstrate a function of nano object pick-up.
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