1024x1024 resistive emitter array design and fabrication status

Abstract

Santa Barbara Infrared (SBIR) is producing a high performance 1,024 x 1,024 Large Format Resistive emitter Array (LFRA) for use in the next generation of IR Scene Projectors (IRSPs). LFRA requirements were developed through close cooperation with the Tri-Service IR Scene Projector working group, and through detailed trade studies sponsored by the OSD Central T&E Investment Program (CTEIP) and a Phase I US Navy Small Business Innovative Research (SBIR) contract. The CMOS Read-In Integrated Circuit (RIIC) is being designed by SBIR and Indigo Systems under a Small Business Innovative Research (SBIR) contract. Performance and features include 750 K MWIR maximum apparent temperature, 5 ms radiance rise time, 200 Hz full frame update, and 400 Hz window mode operation. Ten 8-inch CMOS wafers will be fabricated and characterized in mid-2002, followed by emitter fabrication in late 2002. This paper discusses array performance, requirements flow-down, array design, fabrication of 2 X 2-inch CMOS devices, and plans for subsequent RIIC wafer test and emitter pixel fabrication.© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.