Abstract
Diamond like carbon (DLC) film was prepared for on Si, PTFE and PET using a radio frequency (RF) plasma chemical vapor deposition (CVD) device at process pressure of 1-300Pa. In the present study, a nanoindentation and a bending test were performed for evaluating film hardness. For the bending test, the DLC coated on polymer was bended at 90 degrees, and the number of the resulting cracks of the film was counted using a laser-microscope. As a result, the hardness of DLC film decreased with increasing the process pressure.
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