Abstract
Diamond like carbon (DLC) film was prepared for on Si, PTFE and PET using a radio frequency (RF) plasma chemical vapor deposition (CVD) device at process pressure of 1-300Pa. In the present study, a nanoindentation and a bending test were performed for evaluating film hardness. For the bending test, the DLC coated on polymer was bended at 90 degrees, and the number of the resulting cracks of the film was counted using a laser-microscope. As a result, the hardness of DLC film decreased with increasing the process pressure.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
