100 nm-Gap Fingers Dielectrophoresis Functionalized MOX Gas Sensor Array for Low Temperature VOCs Detection

Luca Francioso,Chiara De Pascali,Antonietta Taurino,Pasquale Creti,Maria Concetta Martucci,Pietro Siciliano,Simonetta Capone

doi:10.3390/proceedings2131027

Luca Francioso, Chiara De Pascali + Show 5 more

Open Access

https://doi.org/10.3390/proceedings2131027

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Abstract

Present work reports the fabrication process and functional gas sensing tests of a 100 nm-gap fingers DiElectroPhoresis (DEP) functionalized MOX (Metal OXide) gas sensor array for VOCs detection at low temperature. The Internet of Things (IoT) scenario applications of the chemical sensing-enabled mobiles or connected devices are many ranging from indoor air quality to novel breath analyser for personal healthcare monitoring. However, the commercial MOX gas sensors operate at moderate temperatures (200–400 °C) [1], and this limits the mobile and wearable gadgets market penetration. Nanogap devices may represent the alternative devices with enhanced sensitivity even at low or room temperature. A nanogap electrodes MOX gas sensor array functionalized with 5 nm average size SnO2 nanocrystals with positive dielectrophoresis technique is presented. The single sensor active area is 4 × 4 µm2. The devices exhibited about 1 order of magnitude response at 100 °C to 150 ppm of acetone.

Highlights

In the recent years, the Internet of Things (IoT) revolution offers new opportunities to explore specific applications with the support of mobile phones and wireless connected devices
Acetone represents one of the most common volatile organic compounds (VOCs) widely used in the industry and it is a selective breath marker for diabetes monitoring; a cheap detection method, like ultra-low power metal oxide gas (MOX) gas sensors may be strategic in the follow-up care of diabetic disease
A nanogap electrodes MOX gas sensor array functionalized with 5 nm average diameter SnO2 nanocrystals with positive dielectrophoresis technique was fabricated

Summary

Introduction

The IoT revolution offers new opportunities to explore specific applications with the support of mobile phones and wireless connected devices. Considering the large market interest in gas sensing technologies for mobile phones and portable devices, detection at low power consumption and low concentrations are driving challenges for nanogap and microfabricated devices [3–7].

Results

Conclusion