Abstract
AbstractThis paper reports on hydrogenated amorphous silicon (a-Si:H) vertical thin film transistors (VTFTs) with channel length of 100 nm, using conventional planar TFT processing technology. The device has a fully self-aligned vertical channel structure, which is highly insensitive to the non-uniformity of reactive ion etching (RIE). Therefore, the VTFT process is very suitable for large-area electronics. Presently, we can demonstrate VTFTs with remarkable ON/OFF current ratio of more than 108, low leakage current down to 1 fA, and good subthreshold slope of 0.8 V/dec at Vd = 1.5 V. The impacts of contemporary device issues, such as short-channel effects and contact resistance, on the performance of short-channel VTFTs and suggested avenues for improvement are discussed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
