Abstract
This study designs a micro-machined BCB-cavity patch antenna and two types of four-element micro-machined antenna arrays at 100 GHz. The patches are fabricated on Benzocyclobutene (BCB) polymer material. The silicon substrate is selective lateral etched under the patch antenna to fabricate a cavity surrounded by metal and filled with BCB material. The BCB-cavity under patches can reduce the excitation of surface waves and enhance the radiation on performance. A single large BCB-cavity is designed to implement the four-element antenna arrays under the consideration of mutual coupling. The proposed single antenna has a 2.8 GHz impedance bandwidth. At 100 GHz, the simulated maximum gain is 6.7 dBi for the single antenna and 13 dBi for the four-element antenna arrays.
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