Abstract
A low-loss 10 GHz range surface acoustic wave (SAW) filter is investigated. It is fabricated on 128° Y-X LiNbO3 using electron beam direct writing and a lift-off process (aluminium electrode width = 95 nm, thickness = 30 nm). Experimental results of the ladder type SAW filter show low loss characteristics. A minimum insertion loss of 3.4 dB in the 10 GHz range is obtained.
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