Abstract
The magnetic properties of Permalloy films are studied as a function of substrate bombardment rate in the process of film synthesis in the recombination burning region of a glow discharge. An unambiguous relationship is found between the film properties and recombination burning intensity. By reconfiguring the recombination region, optimal conditions were found for the synthesis of 30-to 60-nm-thick films with a spread in magnetic properties of about 1% on cold substrates comparable to erosion zones on the target in surface area.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
