1 Million-Q Optomechanical Microdisk Resonators with Very Large Scale Integration

Maxime Hermouet,Guillaume Jourdan,Marc Sansa,Pierre Brianceau,Sébastien Hentz,Jacques-Alexandre Dallery,Pierre Etienne Allain,Thomas Alava,Louise Banniard,Eduardo Gil Santos,Ivan Favero,Marc Gely,Alexandre Fafin,Sébastien Pauliac

doi:10.3390/proceedings1040347

Abstract

Cavity optomechanics have become a promising route towards the development of ultrasensitive sensors for a wide range of applications including mass, chemical and biological sensing. We demonstrate the potential of Very Large Scale Integration (VLSI) with state-of-the-art low-loss performance silicon optomechanical microdisks for real-world applications. We report microdisks exhibiting optical Whispering Gallery Modes (WGM) with 1 million quality factors. These high-Q microdisks allow their Brownian motion to be resolved at few 100 MHz in ambient air. Such performance shows our VLSI process is a viable approach for the next generation of high-end sensors operating in vacuum, gas or liquid phase.

Highlights

Nano-optomechanical resonators have attracted much interest in the last decade and have shown record displacement sensitivities [1]
The devices are the first optomechanical resonators fabricated on 200 mm wafers with
Variable Shaped Beam (VSB) lithography, allowing for both high fabrication throughput and high patterning resolution: each wafer contains more than 120,000 optomechanical devices

Summary

Introduction

Nano-optomechanical resonators have attracted much interest in the last decade and have shown record displacement sensitivities [1]. On-chip light coupling is compatible with standard silicon photonics packaging and uses grating couplers. The devices are the first optomechanical resonators fabricated on 200 mm wafers with

Results

Conclusion